Công ty Tăng Minh Phát Việt Nam là Nhà phân phối của hãng Brook Instrument tại Việt Nam. Chúng tôi chuyên cung cấp Lưu lượng kế trong môi trường nhiệt độ cao (model 9861) chính hãng Brook-Instrument giá cạnh tranh:
Liên hệ cho chúng tôi theo số: 0907 300 847 - 0917 543 068 để được hỗ trợ và tư vấn.
Email : long.tmpvietnam@gmail.com
sale02@tmpvietnam.com
Skype: long.tmpvietnam
Yahoo: longtmp
Features
- Ultra-stable patented IsoSensor™ flow measurement sensor
- Ultra-high purity flow path
- Remote electronics come standard with two analog electrical connectors
- Digital measurement and control architecture
Benefits
- High stability sensor delivers superior uptime, reducing maintenance and lowering total cost of ownership
- All-metal wetted flow path ensures integrity and purity of gas/vapor
- Included 20 pin card edge and a 9 or 15 pin “D” connector enables standardization and reduces inventory
- Enhanced accuracy and process control
Applications
- Optical fiber manufacturing - MCVD
- Silicon semiconductor device fabrication processes
| 9861 | |
| Flow Range (Full Scale Capacity) | 3 sccm - 10 slm (N2 equivalent) |
| Surface Finish | 4µ inch Ra |
| Accuracy |
±1% SP @ 35 - 100% FS
±0.35% FS @ <35% FS
|
| Repeatability | < ±0.15% FS |
| Response Time |
≤ 1 sec to within 2% of SP (per SEMI E17-91)
|
| Diagnostic Capability | |
| Analog Communication |
0-5 Vdc
|
| Digital Communication |
RS485L Protocol
|
Chúng tôi cung cấp đầy đủ các thiết bị từ hãng Brook-Instrument:
| 100% USA Origin | Brooks Instrument Vietnam | Recalibration Model 5853S/BE2BA3BB2BA1B1 |
| For Flow rate between 100-200 slpm N2 Equivalent | ||
| Action : Only recalibration. | ||
| Extra charges if repair required. | ||
| 100% USA Origin | Brooks Instrument Vietnam | Recalibration Model 5851S/BD2BA1BB2BA1B1 |
| Action : Only recalibration. | ||
| Extra charges if repair required | ||
| 100% USA Origin | Brooks Vietnam | SLA5853 Thermal Mass Flow Controller |
| Model: SLA5853SZXXXX | ||
| Flow Meter, Body 3 | ||
| Digital I/O. Communications Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections 10mm Tube Compression | ||
| O-ring Material Viton | ||
| Valve Seat Material Viton | ||
| Valve Type Normally Closed (Press Diff > 2 bar) | ||
| Analog I/O 0-5 VDC | ||
| Power Supply +24 Vdc | ||
| Output Enhancement Standard Setting / Response Time | ||
| Certification Standard Location (Safe Area) | ||
| Customer Process | ||
| Fluid : Air | ||
| Normal Upstream Pressure : 7 bar-a | ||
| Normal Downstream Pressure : 1-5 bar-g | ||
| Meter Specifications | ||
| Meter Flow (Full Scale) : 400 ln/min | ||
| Reference Temp : 0 degC | ||
| Accuracy : +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) | ||
| Max Pressure Rating : 70 bar-g | ||
| Max Temperature : 65 °C | ||
| Note: Spec reference to T88253/009. | ||
| (Mass flow contronllers and metters | ||
| BROOKS INSTRUMENT 6718WX - THE NETHERLANDS | ||
| SN/Year: T88253/009 2008 | ||
| Modelnumber: 5853SBZ1039 | ||
| I/O Signal: 0 - 5VDC 0 - 5VDC & 0 - 20 mA | ||
| OP - Press: pa = 7 Bar | ||
| Range/ fluid: 0 - 400 ln/min Air | ||
| DN 10 | ||
| Limit PS 70 barg@TS: 21 độ C PT 105 | ||
| barg@TS: 21 độ C) | ||
| 100% USA Origin | Brooks Instrument Vietnam | Brooks SLA5850 Thermal Mass Flow Controller |
| Model Code : SLA5850SB1DD1B2A1 | ||
| SLA5850S Flow Controller, Body 0 | ||
| Digital I/O. Communications S Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections B1 1/4” Tube Compression w/Filter | ||
| O-ring Material D Kalrez | ||
| Valve Seat Material D Kalrez | ||
| Valve Type 1 Normally Closed | ||
| Analog I/O B 0-5 VDC | ||
| Power Supply 2 +24 Vdc | ||
| Output Enhancement A Standard Setting / Response Time | ||
| Certification 1 Standard Location (Safe Area) | ||
| (MFC 1: 5850S/BC1GA0AAACA1B1 | ||
| Flowrate (30 ml – 3000ml/min) for wet gas(10% wt SO2 +N2 balance). | ||
| Ope. Pressure max: ? (avoid SO2 condensate to liquid) if condition at Temp: 35°C and the flow: wet gas(10% wt SO2 +N2 balance) | ||
| Output signal: 0..5 Vdc with RS232 interface | ||
| Setpoint signal: 0…5 Vdc or 0..100% RS232 | ||
| Connections: 1/4” OD Compression type (male) | ||
| Seals: Kalrez 6375) | ||
| 100% USA Origin | Brooks Vietnam | SLA5860 Thermal Mass Flow Meter |
| Model Code : SLA5860SB1DA0B2A1 | ||
| SLA5860S Flow Meter, Body 0 | ||
| Digital I/O. Communications S Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections B1 1/4” Tube Compression w/Filter | ||
| O-ring Material D Kalrez | ||
| Valve Seat Material A None | ||
| Valve Type 0 None | ||
| Analog I/O B 0-5 VDC | ||
| Power Supply 2 +24 Vdc | ||
| Output Enhancement A Standard Setting / Response Time | ||
| Certification 1 Standard Location (Safe Area) | ||
| Customer Process | ||
| Fluid: 10% SO2, 5% Water vapor, 85% N2 (percentage in mass) | ||
| Normal Upstream Pressure: 60-150 psig | ||
| Normal Downstream Pressure: 0-110 psig | ||
| Operating temperature : 65 degC | ||
| Meter Specifications | ||
| Meter Flow (Full Scale): 3000 mlst/min | ||
| Reference Temp: 70 degF | ||
| Accuracy: +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) | ||
| Max Pressure Rating: 100 bar-g | ||
| Max Temperature: 65 °C | ||
| NOTE: Operating temp cannot exceed 65 degC | ||
| (MFM 1: 5860S/BC1GA0AACA1B1 | ||
| Request: Need to measure correctly (30 ml – 3000ml/min) for wet gas (10% wt SO2 + 5% steam +N2 balance). | ||
| Flow range: 0…3 ln/min for wet gas(10% wt SO2 + 5% steam +N2 balance) | ||
| Inlet pressure: max. 150 psig @ 70°C | ||
| max. 60 psig @ 35°C | ||
| Outlet pressure: 0…110 psig @ 70°C | ||
| 0 psig @ 35°C | ||
| Temperature: 35°C…70°C | ||
| Output signal: 0..5 Vdc with RS232 interface | ||
| Setpoint signal: 0…5 Vdc or 0..100% RS232 | ||
| Connections: 1/4” OD Compression type (male) | ||
| Seals: Kalrez 6375) | ||
| 100% USA Origin | Brooks Instrument Vietnam | Brooks SLA5860 Thermal Mass Flow Meter |
| Model Code : SLA5860SB1DA0B2A1 | ||
| SLA5860S Flow Meter, Body 0 | ||
| Digital I/O. Communications S Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections B1 1/4” Tube Compression w/Filter | ||
| O-ring Material D Kalrez | ||
| Valve Seat Material A None | ||
| Valve Type 0 None | ||
| Analog I/O B 0-5 VDC | ||
| Power Supply 2 +24 Vdc | ||
| Output Enhancement A Standard Setting / Response Time | ||
| Certification 1 Standard Location (Safe Area) | ||
| Customer Process | ||
| Fluid : 10% CH4O (methanol), 10% Water vapor, 30% CO2, 50% H2 (percentage in mass) | ||
| Normal Upstream Pressure : 1.5-10 bar-g | ||
| Operating temperature : 65 degC | ||
| Meter Specifications | ||
| Meter Flow (Full Scale) : 1000 mlst/min | ||
| Reference Temp : 70 degF | ||
| Accuracy : +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) | ||
| Max Pressure Rating : 100 bar-g | ||
| Max Temperature : 65 °C | ||
| NOTE: 1) Operating temp cannot exceed 65 degC. | ||
| 2) Metal seals not available. | ||
| (MFM 2: 5860S/BC1GA0AACA1B1 | ||
| Flow: 20…1000 ml/min for wet gas (10% wt MeOH vapour +10% steam +30%CO2 50%H2). | ||
| Inlet pressure:. 1.5 barg….10 barg | ||
| Temperature: 35°C…80°C | ||
| Output signal: 0..5 Vdc with RS232 interface | ||
| Setpoint signal: 0…5 Vdc or 0..100% RS232 | ||
| Connections: 1/4” OD Compression type (male) | ||
| Seals: Metal) | ||
| 100% USA Origin | Brooks Vietnam | SLA5853 Thermal Mass Flow Controller |
| Model: SLA5853SZXXXX | ||
| Flow Meter, Body 3 | ||
| Digital I/O. Communications Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections 10mm Tube Compression | ||
| O-ring Material Viton | ||
| Valve Seat Material Viton | ||
| Valve Type Normally Closed (Press Diff > 2 bar) | ||
| Analog I/O 0-5 VDC | ||
| Power Supply +24 Vdc | ||
| Output Enhancement Standard Setting / Response Time | ||
| Certification Standard Location (Safe Area) | ||
| Customer Process | ||
| Fluid : Air | ||
| Normal Upstream Pressure : 7 bar-a | ||
| Normal Downstream Pressure : 1-5 bar-g | ||
| Meter Specifications | ||
| Meter Flow (Full Scale) : 400 ln/min | ||
| Reference Temp : 0 degC | ||
| Accuracy : +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) | ||
| Max Pressure Rating : 70 bar-g | ||
| Max Temperature : 65 °C | ||
| Note: Spec reference to T88253/009. | ||
| (Mass flow contronllers and metters | ||
| BROOKS INSTRUMENT 6718WX - THE NETHERLANDS | ||
| SN/Year: T88253/009 2008 | ||
| Modelnumber: 5853SBZ1039 | ||
| I/O Signal: 0 - 5VDC 0 - 5VDC & 0 - 20 mA | ||
| OP - Press: pa = 7 Bar | ||
| Range/ fluid: 0 - 400 ln/min Air | ||
| DN 10 | ||
| Limit PS 70 barg@TS: 21 độ C PT 105 | ||
| barg@TS: 21 độ C) | ||
| 100% USA Origin | Brooks Instrument Vietnam | Brooks Model 2500 Series Flowmeters |
| Code: 2530A4A68SNVT | ||
| 2530 Acrylic Flowmeter | ||
| Revision A: Revision A | ||
| Tube Tube 4A68: 2-20 SCFM Air | ||
| Fittings S: Stainless Steel | ||
| Valve N: No Valve | ||
| Seals VT: Viton | ||
| 100% USA Origin | Brooks Vietnam | Brooks Oval Flowmeters |
| Replaced by: BM04 | ||
| Code: BM04ASSF2H1CKAA | ||
| (Brooks Oval Flowmeters, BM Oval Series, Models BM04 Through BM50 ® | ||
| Code: BM04ASSN2N1ARAA) | ||
| 100% USA Origin | Brooks Vietnam | SLAMF63 Thermal Mass Flow Meter |
| Replaced by: SLAMF63S3ABA0G2A1A5D1AA1F | ||
| Digital I/O. Communications S: Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections 3A: DIN DN15 PN40 | ||
| O-ring Material B: Buna | ||
| Valve Seat Material A: None (Meter) | ||
| Valve Type 0: None | ||
| Analog I/O G: 4-20mA I/O (PG11 Cable Gland) | ||
| Power Supply 2: +24 Vdc | ||
| Output Enhancement A: Standard Setting / Response Time | ||
| Certification 1: Standard Location (Safe Area) | ||
| Valve Orifice Size: A No Orifice | ||
| Mass Flow Restrictor Type 5: LFE | ||
| Flow Restrictor Size D: Size D | ||
| Calibration conditions 1: Single S-series calibration | ||
| OEM Code A: Standard Brooks Label | ||
| Software Revision A: Revision A | ||
| Mounting Attitute 1: Horizontal base down | ||
| Baudrate F: 19200 | ||
| Customer Process: | ||
| Fluid: CO2 | ||
| Normal Upstream Pressure: 18 bar-g | ||
| Meter Specifications: | ||
| Meter Flow (Full Scale): 40 kg/hr | ||
| Reference Temp : 21.1 degC | ||
| Accuracy: +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) | ||
| Max Pressure Ratin: 70 bar-g | ||
| Max Temperature: 65 °C | ||
| Ingress Protection: IP66 | ||
| SLAMF63S3ABA0G2A1A5D1AA1F voi IP 66 | ||
| Note: IP 66 tot hon IP65 | ||
| (SLA5863S3ABA0C2A1A5D1AA | ||
| IP65) | ||
| 100% USA Origin | Brooks Instrument Vietnam | Model Code: SLA5853S2CAB2B2A1 |
| SLA5853 Mass Flow Controller | ||
| Digital I/O, Communication S: Smart Emulation (analog or RS-485) | ||
| Mechanical Connection 2C: 3/8” Compression | ||
| O-ring material A: Viton | ||
| Valve Seat material B: Viton | ||
| Valve Type 2: Normally Close | ||
| Analog I/O B: 0-5 Volt | ||
| Power Supply 2: +24 Vdc | ||
| Output Enhancement A: Standard Setting / Response time | ||
| Certification 1: Standard Location | ||
| * Customer Process Data: | ||
| Fluid: Air | ||
| Upstream Pressure: 5-10 kg/cm2-g | ||
| Downstream Pressure: Customer to advice | ||
| * Meter Specifications: | ||
| Meter Range (Full Scale): 500 slpm | ||
| Ref Temperature: 70 degF | ||
| Accuracy: +/- 1% Rate | ||
| Max Pressure Rating: 100 bar g | ||
| Max Temperature: 65 °C | ||
| NOTE: Please confirm whether it is ln/min, lst/min or la/min that you need. | ||
| (Brooks Instrument mass flow controller for nitrogen and air. | ||
| - Flow rate: 0 - 500 lit/minute | ||
| - Compress air about 5 - 10 kg/cm2 | ||
| - I/O digital signal can controlled by computer. | ||
| - Material for flow meter is metal) | ||
| 100% USA Origin | Brooks Vietnam | SLAMF63 Thermal Mass Flow Meter |
| Replaced by: SLAMF63S3ABA0G2A1A5D1AA1F | ||
| Digital I/O. Communications S: Smart Emulation (Analog and/or RS485) | ||
| Mechanical Connections 3A: DIN DN15 PN40 | ||
| O-ring Material B: Buna | ||
| Valve Seat Material A: None (Meter) | ||
| Valve Type 0: None | ||
| Analog I/O G: 4-20mA I/O (PG11 Cable Gland) | ||
| Power Supply 2: +24 Vdc | ||
| Output Enhancement A: Standard Setting / Response Time | ||
| Certification 1: Standard Location (Safe Area) | ||
| Valve Orifice Size: A No Orifice | ||
| Mass Flow Restrictor Type 5: LFE | ||
| Flow Restrictor Size D: Size D | ||
| Calibration conditions 1: Single S-series calibration | ||
| OEM Code A: Standard Brooks Label | ||
| Software Revision A: Revision A | ||
| Mounting Attitute 1: Horizontal base down | ||
| Baudrate F: 19200 | ||
| Customer Process: | ||
| Fluid: CO2 | ||
| Normal Upstream Pressure: 18 bar-g | ||
| Meter Specifications: | ||
| Meter Flow (Full Scale): 40 kg/hr | ||
| Reference Temp : 21.1 degC | ||
| Accuracy: +/- 1% Rate (20% to 100% FS), +/-0.2% FS (Below 20% FS) | ||
| Max Pressure Ratin: 70 bar-g | ||
| Max Temperature: 65 °C | ||
| Ingress Protection: IP66 | ||
| SLAMF63S3ABA0G2A1A5D1AA1F voi IP 66 | ||
| Note: IP 66 tot hon IP65 | ||
| (SLA5863S3ABA0C2A1A5D1AA | ||
| IP65) | ||
| 100% USA Origin | Brooks Vietnam | 0254 Read Out & Control |
| Code: 0254AA2B23A | ||
| Type Housing: Panel Mount Kit | ||
| Power Cord For Power Supply: European Power Cord For 220 VAC | ||
| Power Supply Output Voltage: + 24 VDC | ||
| Input/Output Pinout and Signal Adapters: Current Pinout / Voltage Pinout Adapter Set | ||
| Options: RS-232 cable, 3 meter, 9 pin Female “D” | ||
| OEM Code: Standard Brooks Labelling | ||
| 100% USA Origin | Brooks Vietnam | 0254 Read Out & Control |
| Code: 0254AA2B23A | ||
| Type Housing: Panel Mount Kit | ||
| Power Cord For Power Supply: European Power Cord For 220 VAC | ||
| Power Supply Output Voltage: + 24 VDC | ||
| Input/Output Pinout and Signal Adapters: Current Pinout / Voltage Pinout Adapter Set | ||
| Options: RS-232 cable, 3 meter, 9 pin Female “D” | ||
| OEM Code: Standard Brooks Labelling | ||
| 100% USA Origin | Brooks Instrument Vietnam | Brooks SLA5863 Thermal Mass Flow Meter |
| Model: SLA5863S3ABA0C2A1A5D1AA | ||
| (Model: SLA5863S3A0C2A1A5D1AA | ||
| SN : F13319-001 | ||
| Gas : CO2 | ||
| Flow rate : 0-40kg/h) | ||
| 100% USA Origin | Brooks Instrument Vietnam | Brooks SLA5863 Thermal Mass Flow Meter |
| Model: SLA5863S3ABA0C2A1A5D1AA | ||
| (Model: SLA5863S3A0C2A1A5D1AA | ||
| SN : F13319-001 | ||
| Gas : CO2 | ||
| Flow rate : 0-40kg/h) | ||
| 100% USA Origin | Brooks Instrument Vietnam | Replaced by: 1250A-D6041 |
| Brooks Instrument Flowmeter | ||
| 1250 Glass Tube Flow meter | ||
| 1250A: Glass Tube Flow Meter With Horizontal Connections | ||
| Tube model: D6041 Glass float | ||
| Fluid Type: Air | ||
| Unit of measurement: CCM | ||
| End Block Material: Stainless Steel | ||
| Valve Designation: Needle Valve at inlet | ||
| O-ring material: Viton | ||
| Fitting: 1/4" NPT-F | ||
| Note: 1510 model is discontinued. Replacement model is 1250. But flow range is not exactly same. I quoted 20-900 ccm Air. Next higher is 50-1200 ccm | ||
| (Model: 1510 with meet the below specifications | ||
| Pressure: 300psig up to 250oF max | ||
| Material : Glass 316SS | ||
| Connections: 1/4"NPT | ||
| Type of Fluid: Gas. | ||
| Flow range: 100-1000ccm | ||
| Line valve inlet) | ||
| 100% USA Origin | Brooks Vietnam | 3809 Armored Flowmeter |
| 3809/E12D1BEAEAA | ||
| Note: | ||
| · We are assuming it is water for now. | ||
| Do find out the liquid density and viscosity and the flow range required. | ||
| · This model we quoted comes with 4-20mA output transmitter. | ||
| · We follow the code your sales engineer provided. | ||
| · If signal output is not required, please confirm then price is much lower. | ||
| (Model: 3809E12D1) | ||
| 100% USA Origin | Brooks Instrument Vietnam | 5850E Mass Flow Controller |
| Brooks Instrument | ||
| Model: 5850EC1BF3PB2A | ||
| S/N: 8611HCO23461/1. |
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